A new inspection technique helps improve the surface finish of hydraulic cylinder rods, leading to dramatically longer seal life. • Cylinder rod finish can dramatically affect seal life. • Traditional ...
Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process
During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...
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